24 September 2013 Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging
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CEA-Leti has developed a monolithic large focal plane array bolometric technology optimized for 2D real-time imaging in the terahertz range. Each pixel consists in a silicon microbolometer coupled to specific antennas and a resonant quarter-wavelength cavity. First prototypes of imaging arrays have been designed and manufactured for optimized sensing in the 1-3.5THz range where THz quantum cascade lasers are delivering high optical power. NEP in the order of 1 pW/sqrt(Hz) has been assessed at 2.5 THz. This paper reports the steps of this development, starting from the pixel level, to an array associated monolithically to its CMOS ROIC and finally a stand-alone camera. For each step, modeling, technological prototyping and experimental characterizations are presented.
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F. Simoens, F. Simoens, J. Meilhan, J. Meilhan, S. Gidon, S. Gidon, G. Lasfargues, G. Lasfargues, J. Lalanne Dera, J. Lalanne Dera, J. L. Ouvrier-Buffet, J. L. Ouvrier-Buffet, S. Pocas, S. Pocas, W. Rabaud, W. Rabaud, F. Guellec, F. Guellec, B. Dupont, B. Dupont, S. Martin, S. Martin, A. C. Simon, A. C. Simon, "Antenna-coupled microbolometer based uncooled 2D array and camera for 2D real-time terahertz imaging", Proc. SPIE 8846, Terahertz Emitters, Receivers, and Applications IV, 88460O (24 September 2013); doi: 10.1117/12.2024861; https://doi.org/10.1117/12.2024861

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