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27 September 2013 Two-dimensional sub-5-nm hard x-ray focusing with MZP
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Abstract
We present experiments carried out using a combined hard x-ray focusing set-up preserving the benefits of a large-aperture Kirckpatrick-Baez (KB) mirror system and a small focal length multilayer zone plane (MZP). The high gain KB mirrors produce a pre-focus of 400 nm × 200 nm; in their defocus, two MZP lenses of diameter of 1.6 μm and 3.7 μm have been placed, with focal lengths of 50 μm and 250 μm respectively. The lenses have been produced using pulsed laser deposition (PLD) and focused ion beam (FIB). Forward simulations including error models based on measured deviations, auto-correlation analysis and three-plane phase reconstruction support two-dimensional focus sizes of 4.3 nm × 4.7 nm (7:9 keV, W/Si)1 and 4.3 nm ×5.9 nm (13:8 keV, W/ZrO2), respectively.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Markus Osterhoff, Matthias Bartels, Florian Döring, Christian Eberl, Thomas Hoinkes, Sarah Hoffmann, Tobias Liese, Volker Radisch, Arno Rauschenbeutel, Anna-Lena Robisch, Aike Ruhlandt, Felix Schlenkrich, Tim Salditt, and Hans-Ulrich Krebs "Two-dimensional sub-5-nm hard x-ray focusing with MZP", Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 884802 (27 September 2013); doi: 10.1117/12.2025389; https://doi.org/10.1117/12.2025389
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