27 September 2013 Process-induced inhomogeneities in higher asymmetry angle x-ray monochromators
Author Affiliations +
Beam inhomogeneities of asymmetric Ge(220)-based V-shaped and single bounce monochromators have been studied both in metrological and imaging applications for photon energies around 8 keV. Presence of growth striations in graded GeSi, grains in single Cu crystal, and strains in thermally tuned V-channel monochromators observed in X-ray topographs excludes these materials from imaging applications. As for stochastic surface processing, chemomechanical polishing (CMP) produces better surface homogeneity than chemical polish. However, CMP is more difficult to be applied in V-channels, where chemical polishing is prefered. For comparison, measurements on surfaces processed by a deterministic mechanical method of single point diamond turning (SPDT) have shown SPDT to be a perspective technology. Again, to prepare deep grooves with this technique is also a challenge, mainly for tool makers. Some process induced features are observed as wavefield distortions in interference fringes.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. Korytár, D. Korytár, P. Vagovič, P. Vagovič, C. Ferrari, C. Ferrari, P. Šiffalovič, P. Šiffalovič, M. Jergel, M. Jergel, E. Dobročka, E. Dobročka, Z. Zápražný, Z. Zápražný, V. Áč, V. Áč, P. Mikulík, P. Mikulík, "Process-induced inhomogeneities in higher asymmetry angle x-ray monochromators", Proc. SPIE 8848, Advances in X-Ray/EUV Optics and Components VIII, 88480U (27 September 2013); doi: 10.1117/12.2025142; https://doi.org/10.1117/12.2025142


Open-faced z-shaped channel-cut x-ray monochromator
Proceedings of SPIE (November 02 2004)
Design and analysis of a cooled z shaped germanium x...
Proceedings of SPIE (November 02 2004)
Surface features and residual strains in AlON grinding
Proceedings of SPIE (December 26 2001)

Back to Top