Corrosion-resistant Mg/SiC multilayer coatings for EUV laser sources in the 25-80nm wavelength region

Regina Soufli; Mónica Fernández-Perea; Jeff C. Robinson; Sherry L. Baker; Jennifer Alameda; Christopher C. Walton; Luis Rodríguez-De Marcos; Jose A. Méndez; Juan I. Larruquert; Manuela Vidal-Dasilva; Eric M. Gullikson

doi:10.1117/12.2024955

27 September 2013 Corrosion-resistant Mg/SiC multilayer coatings for EUV laser sources in the 25-80nm wavelength region

Regina Soufli, Mónica Fernández-Perea, Jeff C. Robinson, Sherry L. Baker, Jennifer Alameda, Christopher C. Walton, Luis Rodríguez-De Marcos, Jose A. Méndez, Juan I. Larruquert, Manuela Vidal-Dasilva, Eric M. Gullikson

Author Affiliations +

Proceedings Volume 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X; 88490D (2013) https://doi.org/10.1117/12.2024955
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Mg/SiC multilayer coatings with Al-Mg corrosion barrier layers and with high reflectance in up to three narrow wavelength bands within the 25-80 nm wavelength region have been developed for EUV laser source applications. The physics of the spontaneous intermixing and amorphization of the Al-Mg corrosion barriers for Mg/SiC multilayers are currently being investigated in detail. Initial results from studies of the long-term reflectance properties of corrosionresistant Mg/SiC multlayers are also discussed.

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Regina Soufli, Regina Soufli, Mónica Fernández-Perea, Mónica Fernández-Perea, Jeff C. Robinson, Jeff C. Robinson, Sherry L. Baker, Sherry L. Baker, Jennifer Alameda, Jennifer Alameda, Christopher C. Walton, Christopher C. Walton, Luis Rodríguez-De Marcos, Luis Rodríguez-De Marcos, Jose A. Méndez, Jose A. Méndez, Juan I. Larruquert, Juan I. Larruquert, Manuela Vidal-Dasilva, Manuela Vidal-Dasilva, Eric M. Gullikson, Eric M. Gullikson, "Corrosion-resistant Mg/SiC multilayer coatings for EUV laser sources in the 25-80nm wavelength region", Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490D (27 September 2013); doi: 10.1117/12.2024955; https://doi.org/10.1117/12.2024955

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