27 September 2013 Composition depth profiling by soft x-ray laser-ablation mass spectrometry
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Proceedings Volume 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X; 88490G (2013); doi: 10.1117/12.2024535
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States
Abstract
Mass spectrometry plays a vital role in the direct examination of the chemical composition of solids. We have introduced the use of soft x-ray laser ablation for mass spectrometry imaging. Here we demonstrate the method potential for composition depth profiling of multilayer stacks consisting of tens of nanometers thick metal and dielectric films.
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Ilya Kuznetsov, Jorge Filevich, M. Woolston, Elliot R. Bernstein, Dean C. Crick, D. Carlton, W. Chao, E. H. Anderson, Jorge J. Rocca, Carmen S. Menoni, "Composition depth profiling by soft x-ray laser-ablation mass spectrometry", Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490G (27 September 2013); doi: 10.1117/12.2024535; https://doi.org/10.1117/12.2024535
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KEYWORDS
Mass spectrometry

Laser ablation

Profiling

X-ray lasers

Aluminum

Ions

Multilayers

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