27 September 2013 Composition depth profiling by soft x-ray laser-ablation mass spectrometry
Author Affiliations +
Abstract
Mass spectrometry plays a vital role in the direct examination of the chemical composition of solids. We have introduced the use of soft x-ray laser ablation for mass spectrometry imaging. Here we demonstrate the method potential for composition depth profiling of multilayer stacks consisting of tens of nanometers thick metal and dielectric films.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ilya Kuznetsov, Jorge Filevich, M. Woolston, Elliot R. Bernstein, Dean C. Crick, D. Carlton, W. Chao, E. H. Anderson, Jorge J. Rocca, Carmen S. Menoni, "Composition depth profiling by soft x-ray laser-ablation mass spectrometry", Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490G (27 September 2013); doi: 10.1117/12.2024535; https://doi.org/10.1117/12.2024535
PROCEEDINGS
6 PAGES


SHARE
Back to Top