30 September 2013 Tabletop coherent diffraction imaging with a discharge plasma EUV source
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Abstract
We present a coherent diffraction imaging (CDI) experiment using a high-frequency discharge plasma based, extreme ultraviolet (EUV) source. By using different illumination geometries, we generated EUV beams witha varying degree of spatial coherence, which were used to produce far field diffraction patterns from test objects. We then successfully reconstructed an illumination wavefront defined by a circular aperture. The present work explores the feasibility of compact tabletop CDI using a discharge plasma EUV source emerged from the technology development of EUV lithography, which can potentially find application in nanoscience and metrology.
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Larissa Juschkin, Larissa Juschkin, Lars Loetgering, Lars Loetgering, Denis Rudolf, Denis Rudolf, Rui Xu, Rui Xu, Sascha Brose, Sascha Brose, Serhiy Danylyuk, Serhiy Danylyuk, Jianwei Miao, Jianwei Miao, "Tabletop coherent diffraction imaging with a discharge plasma EUV source", Proc. SPIE 8849, X-Ray Lasers and Coherent X-Ray Sources: Development and Applications X, 88490Y (30 September 2013); doi: 10.1117/12.2023895; https://doi.org/10.1117/12.2023895
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