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26 September 2013Development of achromatic full-field x-ray microscopy with compact imaging mirror system
Compact advanced Kirkpatrick–Baez optics are used to construct a microscope that is easy to align and robust against
vibrations and thermal drifts. The entire length of the imaging mirror system is 286 mm, which is 34% shorter than the
previous model. A spatial resolution test is performed in which magnified bright-field images of a pattern are taken with
an X-ray camera at an energy of 10 keV at the BL29XUL beamline of SPring-8. A line-and-space pattern having a 50-
nm width could be resolved, although the image contrast is low.
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S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi, "Development of achromatic full-field x-ray microscopy with compact imaging mirror system," Proc. SPIE 8851, X-Ray Nanoimaging: Instruments and Methods, 885107 (26 September 2013); https://doi.org/10.1117/12.2023152