Development of achromatic full-field x-ray microscopy with compact imaging mirror system

S. Matsuyama; Y. Emi; H. Kino; Y. Sano; Y. Kohmura; K. Tamasaku; M. Yabashi; T. Ishikawa; K. Yamauchi

doi:10.1117/12.2023152

26 September 2013 Development of achromatic full-field x-ray microscopy with compact imaging mirror system

S. Matsuyama, Y. Emi, H. Kino, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi

Author Affiliations +

Proceedings Volume 8851, X-Ray Nanoimaging: Instruments and Methods; 885107 (2013) https://doi.org/10.1117/12.2023152
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Compact advanced Kirkpatrick–Baez optics are used to construct a microscope that is easy to align and robust against vibrations and thermal drifts. The entire length of the imaging mirror system is 286 mm, which is 34% shorter than the previous model. A spatial resolution test is performed in which magnified bright-field images of a pattern are taken with an X-ray camera at an energy of 10 keV at the BL29XUL beamline of SPring-8. A line-and-space pattern having a 50- nm width could be resolved, although the image contrast is low.

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S. Matsuyama, S. Matsuyama, Y. Emi, Y. Emi, H. Kino, H. Kino, Y. Sano, Y. Sano, Y. Kohmura, Y. Kohmura, K. Tamasaku, K. Tamasaku, M. Yabashi, M. Yabashi, T. Ishikawa, T. Ishikawa, K. Yamauchi, K. Yamauchi, } "Development of achromatic full-field x-ray microscopy with compact imaging mirror system", Proc. SPIE 8851, X-Ray Nanoimaging: Instruments and Methods, 885107 (26 September 2013); doi: 10.1117/12.2023152; https://doi.org/10.1117/12.2023152

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