A soft x-ray beamline for quantitative nanotomography using ptychography

Grant A. van Riessen; Mark Junker; Nicholas W. Phillips; Andrew G. Peele

doi:10.1117/12.2027211

26 September 2013 A soft x-ray beamline for quantitative nanotomography using ptychography

Grant A. van Riessen, Mark Junker, Nicholas W. Phillips, Andrew G. Peele

Author Affiliations +

Proceedings Volume 8851, X-Ray Nanoimaging: Instruments and Methods; 885117 (2013) https://doi.org/10.1117/12.2027211
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Soft X-ray nanotomography using ptychography allows quantitative imaging of the internal structure of biological and materials samples with high sensitivity. In this work, we describe progress toward the implementation of an interferometer-controlled microscope located at a beamline that provides coherent ux over the photon energy range of 200 to 2000 eV. Recent experimental results are presented to illustrate the potential for two- and three-dimensional imaging at the nanoscale.

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Grant A. van Riessen, Mark Junker, Nicholas W. Phillips, and Andrew G. Peele "A soft x-ray beamline for quantitative nanotomography using ptychography", Proc. SPIE 8851, X-Ray Nanoimaging: Instruments and Methods, 885117 (26 September 2013); https://doi.org/10.1117/12.2027211

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