Full-field x-ray nano-imaging at SSRF

Biao Deng; Yuqi Ren; Yudan Wang; Guohao Du; Honglan Xie; Tiqiao Xiao

doi:10.1117/12.2035589

26 September 2013 Full-field x-ray nano-imaging at SSRF

Biao Deng, Yuqi Ren, Yudan Wang, Guohao Du, Honglan Xie, Tiqiao Xiao

Proceedings Volume 8851, X-Ray Nanoimaging: Instruments and Methods; 88511D (2013) https://doi.org/10.1117/12.2035589
Event: SPIE Optical Engineering + Applications, 2013, San Diego, California, United States

Abstract

Full field X-ray nano-imaging focusing on material science is under developing at SSRF. A dedicated full field X-ray nano-imaging beamline based on bending magnet will be built in the SSRF phase-II project. The beamline aims at the 3D imaging of the nano-scale inner structures. The photon energy range is of 5-14keV. The design goals with the field of view (FOV) of 20μm and a spatial resolution of 20nm are proposed at 8 keV, taking a Fresnel zone plate (FZP) with outermost zone width of 25 nm. Futhermore, an X-ray nano-imaging microscope is under developing at the SSRF BL13W beamline, in which a larger FOV will be emphasized. This microscope is based on a beam shaper and a zone plate using both absorption contrast and Zernike phase contrast, with the optimized energy set to 10keV. The detailed design and the progress of the project will be introduced.

Citation Download Citation

Biao Deng, Yuqi Ren, Yudan Wang, Guohao Du, Honglan Xie, and Tiqiao Xiao "Full-field x-ray nano-imaging at SSRF", Proc. SPIE 8851, X-Ray Nanoimaging: Instruments and Methods, 88511D (26 September 2013); https://doi.org/10.1117/12.2035589

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