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27 September 2013 Infrared wire grid polarizers: metrology and modeling
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Abstract
Broad and narrow-band wire grid polarizer (WGP) products suitable for MWIR and LWIR applications requiring high contrast were developed on antireflection (AR) coated silicon using Moxtek nanowire patterning capabilities. Accurate metrology was gathered in both transmission and reflection from the SWIR to LWIR using a combination of FTIR and dispersive spectrometers, as well as laser-based light sources. The WGP structures were analyzed using SEM, FIB, and STEM techniques and optical data was derived from IR VASE, transmission, and reflectance measurements. Modeling of device performance was achieved using rigorous coupled wave analysis. Laser damage thresholds were determined and various damage mechanisms identified.
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Matthew C. George, Jonathon Bergquist, Rumyana Petrova, Bin Wang, and Eric Gardner "Infrared wire grid polarizers: metrology and modeling", Proc. SPIE 8873, Polarization Science and Remote Sensing VI, 887302 (27 September 2013); https://doi.org/10.1117/12.2024752
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