Translator Disclaimer
27 September 2013 Infrared wire grid polarizers: metrology and modeling
Author Affiliations +
Broad and narrow-band wire grid polarizer (WGP) products suitable for MWIR and LWIR applications requiring high contrast were developed on antireflection (AR) coated silicon using Moxtek nanowire patterning capabilities. Accurate metrology was gathered in both transmission and reflection from the SWIR to LWIR using a combination of FTIR and dispersive spectrometers, as well as laser-based light sources. The WGP structures were analyzed using SEM, FIB, and STEM techniques and optical data was derived from IR VASE, transmission, and reflectance measurements. Modeling of device performance was achieved using rigorous coupled wave analysis. Laser damage thresholds were determined and various damage mechanisms identified.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Matthew C. George, Jonathon Bergquist, Rumyana Petrova, Bin Wang, and Eric Gardner "Infrared wire grid polarizers: metrology and modeling", Proc. SPIE 8873, Polarization Science and Remote Sensing VI, 887302 (27 September 2013);

Back to Top