Pore-size control of nanopores for membrane nanosieve using nano-imprinting method

Dae-Sik Lee; Hyun Woo Song; Choon Ki Choi; Mun Yun Jung

doi:10.1117/12.2018696

20 May 2013 Pore-size control of nanopores for membrane nanosieve using nano-imprinting method

Dae-Sik Lee, Hyun Woo Song, Choon Ki Choi, Mun Yun Jung

Proceedings Volume 8879, Nano-Bio Sensing, Imaging, and Spectroscopy; 88790C (2013) https://doi.org/10.1117/12.2018696
Event: Nano-Bio Sensing, Imaging and Spectroscopy, 2013, Jeju, Korea, Republic of

Abstract

Micro- and Nano-fabricated membrane sieves have a great potential in molecular separation applications by giving more precise structural and pattern control of shapes. This limitation can be addressed by a class of ultrathin membranes for molecular separations in solutions. Micromachining methods facilitate the accomplishing nanostructures to be used for separation of collections of particles. It makes possible to fabricate nanosieves having a thickness on the order of or even smaller than the diameter of the nanohole [1-2]. However, membrane fragility and complex fabrication have prevented the use of ultrathin membranes for molecular separations [3-4]. Furthermore, it is difficult to control the holes in nanoscale dimensions precisely and uniformly for mass production. Even though there are few reports on the size control of nanopores of the membrane nanosieves, it is necessary to do research on the precise and reliable size control of nanopores for mass production of biosensors or biochips.

Citation Download Citation

Dae-Sik Lee, Hyun Woo Song, Choon Ki Choi, and Mun Yun Jung "Pore-size control of nanopores for membrane nanosieve using nano-imprinting method", Proc. SPIE 8879, Nano-Bio Sensing, Imaging, and Spectroscopy, 88790C (20 May 2013); https://doi.org/10.1117/12.2018696

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KEYWORDS

Silicon

Blood

Nanolithography

Ions

Etching

Scanning electron microscopy

Semiconducting wafers

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