A grating microcantilever biosensor based on diffraction spectrum feedback balanced

Feng Wen; Yuejin Zhao; Xiaomei Yu

doi:10.1117/12.2017714

20 May 2013 A grating microcantilever biosensor based on diffraction spectrum feedback balanced

Feng Wen, Yuejin Zhao, Xiaomei Yu

Proceedings Volume 8879, Nano-Bio Sensing, Imaging, and Spectroscopy; 88790Y (2013) https://doi.org/10.1117/12.2017714
Event: Nano-Bio Sensing, Imaging and Spectroscopy, 2013, Jeju, Korea, Republic of

Abstract

A kind of novel reflective grating microcantilever based on SOI was designed and fabricated for biosensing. For measuring the extremely low deflections of the microcantilever, a high precision optical readout approach based on diffraction spectrum balancing feedback control was presented. The read out system include a PI M-038 precision motorized rotation stage, a CCD, a 650 nm laser, a fiber, a min fiber GRIN collimator and lens. The practical measurement resolution of the system is up to 1x10^-4 deg, that is to say, for a length of 250um microcantilever, the tip measure resolution is up to 0.043nm.

Citation Download Citation

Feng Wen, Yuejin Zhao, and Xiaomei Yu "A grating microcantilever biosensor based on diffraction spectrum feedback balanced", Proc. SPIE 8879, Nano-Bio Sensing, Imaging, and Spectroscopy, 88790Y (20 May 2013); https://doi.org/10.1117/12.2017714

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