20 May 2013 A grating microcantilever biosensor based on diffraction spectrum feedback balanced
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Proceedings Volume 8879, Nano-Bio Sensing, Imaging, and Spectroscopy; 88790Y (2013) https://doi.org/10.1117/12.2017714
Event: Nano-Bio Sensing, Imaging and Spectroscopy, 2013, Jeju, Korea, Republic of
Abstract
A kind of novel reflective grating microcantilever based on SOI was designed and fabricated for biosensing. For measuring the extremely low deflections of the microcantilever, a high precision optical readout approach based on diffraction spectrum balancing feedback control was presented. The read out system include a PI M-038 precision motorized rotation stage, a CCD, a 650 nm laser, a fiber, a min fiber GRIN collimator and lens. The practical measurement resolution of the system is up to 1x10-4 deg, that is to say, for a length of 250um microcantilever, the tip measure resolution is up to 0.043nm.
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Feng Wen, Yuejin Zhao, Xiaomei Yu, "A grating microcantilever biosensor based on diffraction spectrum feedback balanced", Proc. SPIE 8879, Nano-Bio Sensing, Imaging, and Spectroscopy, 88790Y (20 May 2013); doi: 10.1117/12.2017714; https://doi.org/10.1117/12.2017714
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