1 October 2013 Model-driven target optimization to resolve design hotspots through image quality enhancement
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Model-driven target optimization using an ILT hotspot fixer is applied to line collapsing defects of 2- dimensional randomtest pattern of a very low K1 process. The target is moved by minimizing the process variation band and the pitches of hotspot points are relaxed.The image quality improvement is thenchecked. Model driven target optimized NILS and MEEF at the weakest hotspot point are improved to 1.22 and 5.5 from the values 0.79 and 10.6 of a traditional OPCwith advanced solver, respectively. The pattern collapsing hotspot is then validated to be repaired by optimizing target position. A full hotspot fixer flow including model-driven target optimization using ILT can also be extended into DFM applications.
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Sung-Woo Lee, Sung-Woo Lee, Tom Cecil, Tom Cecil, Guangming Xiao, Guangming Xiao, Mindy Lee, Mindy Lee, Jung-Hoe Choi, Jung-Hoe Choi, Seung-Hee Baek, Seung-Hee Baek, Jin-Hyuck Jeon, Jin-Hyuck Jeon, Chan Ha Park, Chan Ha Park, Dave Kim, Dave Kim, Kevin Lucas, Kevin Lucas, "Model-driven target optimization to resolve design hotspots through image quality enhancement", Proc. SPIE 8880, Photomask Technology 2013, 88801U (1 October 2013); doi: 10.1117/12.2026140; https://doi.org/10.1117/12.2026140

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