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9 October 2013 Finite-element based electromagnetic field simulations: benchmark results for isolated structures
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Abstract
We use a finite-element method to obtain highly converged results for a nano-optical light scattering setup with a non-periodic geometry.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sven Burger, Lin Zschiedrich, Jan Pomplun, and Frank Schmidt "Finite-element based electromagnetic field simulations: benchmark results for isolated structures", Proc. SPIE 8880, Photomask Technology 2013, 88801Z (9 October 2013); https://doi.org/10.1117/12.2026213
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