15 October 2013 Relationships between subsurface damage depth and surface roughness of grinded glass optics
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Proceedings Volume 8884, Optifab 2013; 88840C (2013) https://doi.org/10.1117/12.2028880
Event: SPIE Optifab, 2013, Rochester, New York, United States
Abstract
Relationships between subsurface damage (SSD) depth and peak to valley surface roughness (Rt) have been widely studied and present a major interest for an easy assessment of the SSD depth. We seek the relation between SSD depth and other surface roughness parameters using the Abbott-Firestone curve on a large campaign of grinding tests (with different abrasive grain size, grinding speed and grinding mode). The results reveal that the Abbott-Firestone parameter Mr2, which can be linked to the volume fraction of valley in the roughness profile, is more accurate than Rt for an assessment of the SSD depth and that the relationship between Mr2 and the SSD depth varies when changing the grinding mode.
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P. Blaineau, R. Laheurte, P. Darnis, N. Darbois, O. Cahuc, J. Néauport, "Relationships between subsurface damage depth and surface roughness of grinded glass optics", Proc. SPIE 8884, Optifab 2013, 88840C (15 October 2013); doi: 10.1117/12.2028880; https://doi.org/10.1117/12.2028880
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