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15 October 2013 Non-contact metrology of aspheric surfaces based on MWLI technology
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Proceedings Volume 8884, Optifab 2013; 88840V (2013)
Event: SPIE Optifab, 2013, Rochester, New York, United States
A non-contact optical scanning metrology solution measuring aspheric surfaces is presented, which is based on multi wavelength interferometry (MWLI). The technology yields high density 3D data in short measurement times (including set up time) and provides high, reproducible form measurement accuracy. It measures any asphere without restrictions in terms of spherical departures. In addition, measurement of a large variety of special optics is enabled, such as annular lenses, segmented optics, optics with diffractive steps, ground optics, optics made of opaque and transparent materials, and small and thin optics (e.g. smart phone lenses). The measurement instrument can be used under production conditions.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
G. Berger and J. Petter "Non-contact metrology of aspheric surfaces based on MWLI technology", Proc. SPIE 8884, Optifab 2013, 88840V (15 October 2013);

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