3D-form metrology of arbitrary optical surfaces by absorption in fluids

Juan Carlos Martínez Antón; Juan Manuel Plaza Ortega; José Alonso

doi:10.1117/12.2030508

15 October 2013 3D-form metrology of arbitrary optical surfaces by absorption in fluids

Juan Carlos Martínez Antón, Juan Manuel Plaza Ortega, José Alonso

Proceedings Volume 8884, Optifab 2013; 888413 (2013) https://doi.org/10.1117/12.2030508
Event: SPIE Optifab, 2013, Rochester, New York, United States

Abstract

We present an imaging technique for the 3D-form metrology of optical surfaces. It is based on the optical absorption in fluids situated between the surface and a reference. An improved setup with a bi-chromatic light source is fundamental to obtain reliable topographic maps. It is able to measure any surface finish (rough or polished), form and slope and independently of scale. We present results focused on flat and spherical optical surfaces, arrays of lenses and with different surface finish (rough-polished). We achieve form accuracies from several nanometers to sub-lambda for sag departures from tens to hundred of microns. Therefore, it seems suitable for the quality control in the production of precision aspheric, freeform lenses and other complex shapes on transparent substrates, independently of the surface finish.

Citation Download Citation

Juan Carlos Martínez Antón, Juan Manuel Plaza Ortega, and José Alonso "3D-form metrology of arbitrary optical surfaces by absorption in fluids", Proc. SPIE 8884, Optifab 2013, 888413 (15 October 2013); https://doi.org/10.1117/12.2030508

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