15 October 2013 Development of a calibration standard for spherical aberration
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Proceedings Volume 8884, Optifab 2013; 88841J (2013) https://doi.org/10.1117/12.2032535
Event: SPIE Optifab, 2013, Rochester, New York, United States
There are no calibration standards currently available for metrology equipment used to measure spherical aberration. We have selected a set of plano-convex lenses that can be used as spherical aberration calibration standards. The key parameters of the lenses were measured using a nodal optical bench and a low coherence interferometer. Spherical aberrations of the lenses were measured using a commercially available aberrometer the CrystalWave™, based on a Shack-Hartmann wavefront sensor. The lenses were then modeled in optical modeling software, where the spherical curvatures of the lenses were adjusted to match the key parameters. The measured spherical aberrations were then compared to the values provided by the modeling software.
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David C. Compertore, David C. Compertore, Filipp V. Ignatovich, Filipp V. Ignatovich, Matthew E. Herbrand, Matthew E. Herbrand, Michael A. Marcus, Michael A. Marcus, } "Development of a calibration standard for spherical aberration", Proc. SPIE 8884, Optifab 2013, 88841J (15 October 2013); doi: 10.1117/12.2032535; https://doi.org/10.1117/12.2032535

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