15 October 2013 Effect of polishing plane vibration on large-size optical workpieces in continuous polishing
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Proceedings Volume 8884, Optifab 2013; 88841S (2013) https://doi.org/10.1117/12.2032540
Event: SPIE Optifab, 2013, Rochester, New York, United States
Abstract
Effect of the polishing plane vibration on large-size optical workpieces in continuous polishing is studied. The vibration equation was deduced based on the existence of inclination between the polishing plane and z-axis direction. Influences of different parameters, such as the inclination, rotation speeds of the polishing plane and workpiece, the eccentricity and workpiece radius, on the polishing plane vibration were simulated. The simulations results show that rotation speeds of the polishing plane and workpiece is the most significant factor. The chaotic vibration of the polishing plane increases with increasing rotation speeds differences between the polishing plane and workpiece. When differences are small, periodic ups and downs of the polishing plane occur with the increase of polishing time. Experiments verified the influence of rotation speeds differences on the polishing plane vibration. The vibration affects PV of large-size optical workpieces in continuous polishing.
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Haiyang Shan, Haiyang Shan, Chaoyang Wei, Chaoyang Wei, Xueke Xu, Xueke Xu, Hongbo He, Hongbo He, Shijie Liu, Shijie Liu, Yingfeng Li, Yingfeng Li, Kui Yi, Kui Yi, Jianda Shao, Jianda Shao, } "Effect of polishing plane vibration on large-size optical workpieces in continuous polishing", Proc. SPIE 8884, Optifab 2013, 88841S (15 October 2013); doi: 10.1117/12.2032540; https://doi.org/10.1117/12.2032540
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