Study on the laser induced damage performance of HfO2, Sc2O3, Y2O3, Al2O3 and SiO2 monolayer coatings

Meiping Zhu; Kui Yi; Dawei Li; Hongji Qi; Yuanan Zhao; Jie Liu; Xiaofeng Liu; Guohang Hu; Jianda Shao

doi:10.1117/12.2030092

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14 November 2013 Study on the laser-induced damage performance of HfO₂, Sc₂O₃, Y₂O₃, Al₂O₃ and SiO₂ monolayer coatings

Meiping Zhu, Kui Yi, Dawei Li, Hongji Qi, Yuanan Zhao, Jie Liu, Xiaofeng Liu, Guohang Hu, Jianda Shao

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Proceedings Volume 8885, Laser-Induced Damage in Optical Materials: 2013; 888508 (2013) https://doi.org/10.1117/12.2030092
Event: SPIE Laser Damage, 2013, Boulder, Colorado, United States

Abstract

The laser induced damage threshold (LIDT) and damage morphology of the monolayer coating are easily influenced by the finish condition of the substrate, which makes it difficult to compare the LIDT of different coating materials. In order to eliminate the influence of defect and sub-defect on the substrate, HfO₂, Sc₂O₃, Y₂O₃, Al₂O₃ and SiO₂ monolayer coatings were prepared on 1064 nm HfO₂/SiO₂ high reflection coatings, using conventional e-beam deposition. The LIDT, as well as the damage morphology after laser irradiation at wavelength of 1064 nm, was measured and compared with that of the monolayer coating deposited on BK7 glass substrate.

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Meiping Zhu, Kui Yi, Dawei Li, Hongji Qi, Yuanan Zhao, Jie Liu, Xiaofeng Liu, Guohang Hu, and Jianda Shao "Study on the laser-induced damage performance of HfO₂, Sc₂O₃, Y₂O₃, Al₂O₃ and SiO₂ monolayer coatings", Proc. SPIE 8885, Laser-Induced Damage in Optical Materials: 2013, 888508 (14 November 2013); https://doi.org/10.1117/12.2030092

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