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14 November 2013Study on the laser-induced damage performance of HfO2, Sc2O3, Y2O3, Al2O3 and SiO2 monolayer coatings
The laser induced damage threshold (LIDT) and damage morphology of the monolayer coating are easily influenced by
the finish condition of the substrate, which makes it difficult to compare the LIDT of different coating materials. In order
to eliminate the influence of defect and sub-defect on the substrate, HfO2, Sc2O3, Y2O3, Al2O3 and SiO2 monolayer
coatings were prepared on 1064 nm HfO2/SiO2 high reflection coatings, using conventional e-beam deposition. The LIDT, as well as the damage morphology after laser irradiation at wavelength of 1064 nm, was measured and compared with that of the monolayer coating deposited on BK7 glass substrate.