1 October 2013 Consequent use of IT tools as a driver for cost reduction and quality improvements
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Proceedings Volume 8886, 29th European Mask and Lithography Conference; 888603 (2013) https://doi.org/10.1117/12.2031399
Event: 29th European Mask and Lithography Conference, 2013, Dresden, Germany
Abstract
The semiconductor industry drives a lot of efforts in the field of cost reductions and quality improvements. The consequent use of IT tools is one possibility to support these goals. With the extensions of its 150mm Fab to 200mm Robert Bosch increased the systematic use of data analysis and Advanced Process Control (APC).
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Stefan Hein, Roberto Rapp, Andreas Feustel, "Consequent use of IT tools as a driver for cost reduction and quality improvements", Proc. SPIE 8886, 29th European Mask and Lithography Conference, 888603 (1 October 2013); doi: 10.1117/12.2031399; https://doi.org/10.1117/12.2031399
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