Microfabricated support structures for investigations of mechanical and electrical graphene properties

Krzysztof Gajewski; Teodor Gotszalk; Andrzej Sierakowski; Paweł Janus; Piotr Grabiec

doi:10.1117/12.2030886

25 July 2013 Microfabricated support structures for investigations of mechanical and electrical graphene properties

Krzysztof Gajewski, Teodor Gotszalk, Andrzej Sierakowski, Paweł Janus, Piotr Grabiec

Proceedings Volume 8902, Electron Technology Conference 2013; 89020G (2013) https://doi.org/10.1117/12.2030886
Event: Electron Technology Conference 2013, 2013, Ryn, Poland

Abstract

In this work we present the grid of microstructures which is used for the graphene mechanical and electrical properties investigations. The design of the mask used for the grid production was presented. Afterwards the technological process steps for the grid production were described. In result the support structures – trenches – in shape of lines, squares and circles are obtained with the detail dimensions varied from 1 micrometer up to 30 micrometers. Examples of graphite and graphene deposited on the support structures are also presented.

Citation Download Citation

Krzysztof Gajewski, Teodor Gotszalk, Andrzej Sierakowski, Paweł Janus, and Piotr Grabiec "Microfabricated support structures for investigations of mechanical and electrical graphene properties", Proc. SPIE 8902, Electron Technology Conference 2013, 89020G (25 July 2013); https://doi.org/10.1117/12.2030886

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