25 July 2013 Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures
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Proceedings Volume 8902, Electron Technology Conference 2013; 89021X (2013) https://doi.org/10.1117/12.2031093
Event: Electron Technology Conference 2013, 2013, Ryn, Poland
Abstract
Increased interest in micro-and nano-electromechanical systems (MEMS and NEMS) entail the development of reliable measurement techniques for the basic parameters of the designed and manufactured devices. The proposed methodology should provide high resolution, wide frequency range and the possibility to investigate both mechanical and electrical parameters during inspection process. In this article authors present methods for manufacturing of electrostatic MEMS devices. Measurement techniques will be presented for specifying parameters such as resonant frequency, quality factor and sensitivity of the previously manufactured structures. Manufacturing techniques will be presented on the example of the micropusher structure, whereas measurement techniques will be presented on the example of the microgripper structure.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Magdalena A. Ekwińska, Magdalena A. Ekwińska, Piotr Kunicki, Piotr Kunicki, Tomasz Piasecki, Tomasz Piasecki, Paweł Janus, Paweł Janus, Krzysztof Domański, Krzysztof Domański, Tomasz Bieniek, Tomasz Bieniek, Piotr Grabiec, Piotr Grabiec, Teodor Gotszalk, Teodor Gotszalk, } "Manufacturing, measurement and control of MEMS / NEMS electrostatically driven structures ", Proc. SPIE 8902, Electron Technology Conference 2013, 89021X (25 July 2013); doi: 10.1117/12.2031093; https://doi.org/10.1117/12.2031093
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