25 July 2013 Metal oxide nanostructures for gas detection
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Proceedings Volume 8902, Electron Technology Conference 2013; 890226 (2013) https://doi.org/10.1117/12.2030298
Event: Electron Technology Conference 2013, 2013, Ryn, Poland
Currently, most of gas sensors on the market are produced in thin or thick film technologies with the use of ceramic substrates. It is expected that the miniature sensors needed in portable applications will be based on one-dimensional structures due to their low power consumption, fast and stable time response, small dimensions and possibility of embedding in integrated circuit together with signal conditioning electronics. The authors manufactured resistance type gas sensors based on ZnO and WO3 nanostructures. ZnO:Al nanorods with good cristallinity were obtained with electrodeposition method, while ZnO:Al nanofibres with varying diameters were obtained by electrospinning method. The sensors were built as a nanowire network. WO3 films with nanocrystalline surface were manufactured by deposition of a three layer WO3/W/WO3 structure by RF sputtering and successive annealing of the structure in appropriate temperature range. In effect a uniform nanostructurized metal oxide layer was formed. Investigation of sensors characteristics revealed good sensitivity to nitrogen dioxide at temperatures lower than these for conventional conductometric type sensors.
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Wojciech Maziarz, Wojciech Maziarz, Tadeusz Pisarkiewicz, Tadeusz Pisarkiewicz, Artur Rydosz, Artur Rydosz, Kinga Wysocka, Kinga Wysocka, Grzegorz Czyrnek, Grzegorz Czyrnek, "Metal oxide nanostructures for gas detection", Proc. SPIE 8902, Electron Technology Conference 2013, 890226 (25 July 2013); doi: 10.1117/12.2030298; https://doi.org/10.1117/12.2030298

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