19 September 2013 A novel design measuring method based on linearly polarized laser interference
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Proceedings Volume 8905, International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications; 89050J (2013) https://doi.org/10.1117/12.2032839
Event: ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging, 2013, Beijing, China
Abstract
The interferometric method is widely used in the precision measurement, including the surface quality of the large-aperture mirror. The laser interference technology has been developing rapidly as the laser sources become more and more mature and reliable. We adopted the laser diode as the source for the sake of the short coherent wavelength of it for the optical path difference of the system is quite shorter as several wavelengths, and the power of laser diode is sufficient for measurement and safe to human eye. The 673nm linearly laser was selected and we construct a novel form of interferometric system as we called ‘Closed Loop’, comprised of polarizing optical components, such as polarizing prism and quartz wave plate, the light from the source split by which into measuring beam and referencing beam, they’ve both reflected by the measuring mirror, after the two beams transforming into circular polarization and spinning in the opposite directions we induced the polarized light synchronous phase shift interference technology to get the detecting fringes, which transfers the phase shifting in time domain to space, so that we did not need to consider the precise-controlled shift of optical path difference, which will introduce the disturbance of the air current and vibration. We got the interference fringes from four different CCD cameras well-alignment, and the fringes are shifted into four different phases of 0, π/2, π, and 3π/2 in time. After obtaining the images from the CCD cameras, we need to align the interference fringes pixel to pixel from different CCD cameras, and synthesis the rough morphology, after getting rid of systematic error, we could calculate the surface accuracy of the measuring mirror. This novel design detecting method could be applied into measuring the optical system aberration, and it would develop into the setup of the portable structural interferometer and widely used in different measuring circumstances.
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Yanbo Cao, Hua Ai, Nan Zhao, "A novel design measuring method based on linearly polarized laser interference", Proc. SPIE 8905, International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications, 89050J (19 September 2013); doi: 10.1117/12.2032839; https://doi.org/10.1117/12.2032839
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