19 September 2013 Effect analysis of nonuniformity on four-quadrant detector and compensation correction
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Proceedings Volume 8905, International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications; 890530 (2013) https://doi.org/10.1117/12.2037858
Event: ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging, 2013, Beijing, China
Abstract
The four-quadrant detector is mainly used for high-precision position measurement and related fields, and the requirement of accuracy keeps increasing. The effection of photoresponse nonuniformity on measurement accuracy of four-quadrant detector is analyzed theoretically in this paper. The correction method is proposed through calculation, simulation and analysis. Finally, the experimental platform is built to verify. The results of experiments demonstrate that after compensated correction, the nonuniformity of detector has been 46.17% compensated, the nonlinear deviation has been decreased by 44.1%, the measurement accuracy of spot displacement has been improved by 1.33 times.
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Zijun Gao, Zijun Gao, Lili Dong, Lili Dong, Wenhai Xu, Wenhai Xu, } "Effect analysis of nonuniformity on four-quadrant detector and compensation correction", Proc. SPIE 8905, International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications, 890530 (19 September 2013); doi: 10.1117/12.2037858; https://doi.org/10.1117/12.2037858
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