24 September 2013 Design and analysis of displacement measurement system based on the four-quadrant detector
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Proceedings Volume 8905, International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications; 890531 (2013) https://doi.org/10.1117/12.2040172
Event: ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging, 2013, Beijing, China
Abstract
The four-quadrant detector is mainly used in high-precision displacement measurement and other related fields. With the emergence of displacement problem in a large number of projects, the displacement measurement accuracy, speed and reliability have become increasingly demanding. In this paper, the measurement principle of four-quadrant detector is analyzed theoretically, the displacement measurement system based on four-quadrant detector is designed, and the experimental platform is built to test and validate the stability, measurement accuracy and range of the displacement measurement system. Experimental results show that: the deviation of the same spot position on measurement system is less than 0.17μm. The measurement error of spot displacement is less than 3.7μm.
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Zi-jun Gao, Li-li Dong, Wen-hai Xu, "Design and analysis of displacement measurement system based on the four-quadrant detector", Proc. SPIE 8905, International Symposium on Photoelectronic Detection and Imaging 2013: Laser Sensing and Imaging and Applications, 890531 (24 September 2013); doi: 10.1117/12.2040172; https://doi.org/10.1117/12.2040172
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