Fabrication and performance of InAs/GaSb type-II superlattices mid-wavelength infrared detectors

Li-peng Yang; Jun Deng; Yan-li Shi; Yong-yuan Chen; Bo Wu

doi:10.1117/12.2034514

11 September 2013 Fabrication and performance of InAs/GaSb type-II superlattices mid-wavelength infrared detectors

Li-peng Yang, Jun Deng, Yan-li Shi, Yong-yuan Chen, Bo Wu

Proceedings Volume 8907, International Symposium on Photoelectronic Detection and Imaging 2013: Infrared Imaging and Applications; 890741 (2013) https://doi.org/10.1117/12.2034514
Event: ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging, 2013, Beijing, China

Abstract

Infrared photodetectors were widely applied in satellite detection, infrared-guided, infrared early warning and infrared imaging and so on. Currently, InAs/GaSb type-II superlattices (T2SLs) photodetectors have been attracted by their unique band-structure and potential applications. In this paper, the InAs/GaSb T2SLs photodetectors in mid-wavelength infrared (MWIR) spectral range were fabricated with p-i-n structure, and the process parameters were optimized. The multilayer structure was grown on GaSb substrate by Molecular Beam Epitaxy (MBE). The active area of this photodetector was 260μm×260μm, and the sidewall of mesa was protected by SiO₂ layer. The thickness of adsorption layer was 1060 nm. To reserve more incident area and to avoid the damage caused by welding process, the pad of electrodes were designed under the mesa. A annular electrode was designed to shorten the transmission time of carriers to improve the collection efficiently. The cut-off wavelength λ_c of the detector was 4.2μm@77K, and the dark current density was measured as 1.07×10^-3 A/cm²@V_b=-0.1V. The peak of specific blackbody detectivity (D*) was equal to 1.05×10¹⁰ cmHz^1/2/W at zero-bias.

Citation Download Citation

Li-peng Yang, Jun Deng, Yan-li Shi, Yong-yuan Chen, and Bo Wu "Fabrication and performance of InAs/GaSb type-II superlattices mid-wavelength infrared detectors", Proc. SPIE 8907, International Symposium on Photoelectronic Detection and Imaging 2013: Infrared Imaging and Applications, 890741 (11 September 2013); https://doi.org/10.1117/12.2034514

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