Orthogonal experiment and analysis on process parameters of bowl feed polishing (BFP)

Kai Meng; Yongjian Wan; Qinglan Xu; Yang Yang

doi:10.1117/12.2034686

23 August 2013 Orthogonal experiment and analysis on process parameters of bowl feed polishing (BFP)

Kai Meng, Yongjian Wan, Qinglan Xu, Yang Yang

Proceedings Volume 8911, International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications; 89110Q (2013) https://doi.org/10.1117/12.2034686
Event: ISPDI 2013 - Fifth International Symposium on Photoelectronic Detection and Imaging, 2013, Beijing, China

Abstract

With the development of science and technology, the demand for high-precision product is increasing continuously. Ultra-smooth surface with sub-nanometer roughness has extensive applications in the field of soft X-ray optics, high power laser and laser gyro. Bowl feed polishing (BFP) technology is an effective ultra-smooth surface processing method, but the polishing process of BFP which is affected by a lot of factors is extremely complex and difficult to control. It is important to understand the effect of the process variables such as abrasive particle size, concentration of abrasive particle, speed of polishing pad, acidity and polishing time in the process of BFP. They are very important parameters that must be carefully formulated to achieve desired material removal rates and surface roughness. Using a design of experiment (DOE) approach, this study was performed investigating the main effect of the each parameter during K9 BFP. A better understanding of the interaction behavior between the various parameters and the effect on removal rate and surface roughness is achieved by using the statistical analysis techniques. In the experimental tests, the optimized parameters combination for BFP which were derived from the statistical analysis could be found for material removal rate and better surface roughness through the above experiment results.

Citation Download Citation

Kai Meng, Yongjian Wan, Qinglan Xu, and Yang Yang "Orthogonal experiment and analysis on process parameters of bowl feed polishing (BFP)", Proc. SPIE 8911, International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications, 89110Q (23 August 2013); https://doi.org/10.1117/12.2034686

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