10 October 2013 Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection
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Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 891609 (2013) https://doi.org/10.1117/12.2035942
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China
Abstract
A nanopipette ball probe has been introduced for the dimensional measurement of the micrometer-scale structures. A hollow glass nanopipette, which is fabricated by thermal pulling process, is used as the shaft of the probe for the detection of the contact. Since the stiffness of the glass nanopipette is lower than that of metal shaft which is similar size of the glass nanopipette, the contact force between the probe and the sample will be able to reduce in comparison with the probe of the metal shaft. The edge of the nanopipette is filled with the thermosetting resin, and a micro glass sphere with 9 mm diameter is fixed on the edge of the nanopipette probe by the thermosetting resin. By attaching the micro sphere at the edge of the nanopipette, the edge of the probe will be possible to maintain a uniform shape in all directions. With regard to the detection of the contact, the method of the shear-force detection has been employed because of its high-sensitivity and nanometer-scale resolution. The resolution and the sensitivity of the nanopipette probe are evaluated, and then surface profile measurement of the microstructure is demonstrated.
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S. Ito, S. Ito, I. Kodama, I. Kodama, W. Gao, W. Gao, "Dimensional measurement of micrometer-scale structures with a nanopipette ball probe by using shear-force detection ", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 891609 (10 October 2013); doi: 10.1117/12.2035942; https://doi.org/10.1117/12.2035942
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