You have requested a machine translation of selected content from our databases. This functionality is provided solely for your convenience and is in no way intended to replace human translation. Neither SPIE nor the owners and publishers of the content make, and they explicitly disclaim, any express or implied representations or warranties of any kind, including, without limitation, representations and warranties as to the functionality of the translation feature or the accuracy or completeness of the translations.
Translations are not retained in our system. Your use of this feature and the translations is subject to all use restrictions contained in the Terms and Conditions of Use of the SPIE website.
10 October 2013Nanometrology interferometric coordinates measurement system for local probe microscopy
We present an overview of approaches to the design of nanometrology measuring setups with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a positioning system with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the microand nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.
The alert did not successfully save. Please try again later.
Jan Hrabina, Josef Lazar, Petr Klapetek, Ondrej Cip, Martin Cizek, Mojmir Sery, "Nanometrology interferometric coordinates measurement system for local probe microscopy ," Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89160C (10 October 2013); https://doi.org/10.1117/12.2035477