10 October 2013 Elastic mechanism design of a CMM contact probe
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Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 89160P (2013) https://doi.org/10.1117/12.2035794
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China
Abstract
The measurement of miniature components with a micro- or nano-coordinate measuring machine requires a high precision contact scanning probe. The elastic mechanism of low stiffness is a major component of the contact scanning probe. A new elastic mechanism is analyzed by the theory of elasticity and finite element analysis in this paper. It is to realize the probe’s mechanical behavior and stiffness when designing an elastic mechanism for a contact scanning probe. The contact scanning probe is composed of a tungsten stylus with a ruby ball tip, a mechanism of floating plate suspended by four V-shaped leaf springs, and a 3D optical sensor. The leaf spring experiences elastic deformation when a contact force is applied. Uniform stiffness model is analyzed. Simulation and experimental results verify the correctness of the analysis.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rui-Jun Li, Rui-Jun Li, Kuang-Chao Fan, Kuang-Chao Fan, Hao Zhou, Hao Zhou, Na Wang, Na Wang, Qiang-xian Huang, Qiang-xian Huang, "Elastic mechanism design of a CMM contact probe", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89160P (10 October 2013); doi: 10.1117/12.2035794; https://doi.org/10.1117/12.2035794
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