Design and finite element analysis of the vibration isolation system of STM

Yunqiang Liu; Xing Fu; Linyan Xu; Yunpeng Song

doi:10.1117/12.2036878

10 October 2013 Design and finite element analysis of the vibration isolation system of STM

Yunqiang Liu, Xing Fu, Linyan Xu, Yunpeng Song

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 89160Y (2013) https://doi.org/10.1117/12.2036878
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

Vibration isolation system is a prerequisite to achieve high resolution picture using scanning tunnel microscope (STM). The principle of spring damping isolation, staked flat-elastomer isolation, pneumatic isolation, and sandbox damping isolation is introduced. The relationship between resonant frequency of the isolation and the effect is presented. The four resonant frequencies are calculated through Finite Element Analysis (FEA). The four vibration isolations is designed and optimized according to the analysis. The experimental results show that spring damping isolation has the best effect and a transfer ratio of 10^-6(120dB) can be obtained.

Citation Download Citation

Yunqiang Liu, Xing Fu, Linyan Xu, and Yunpeng Song "Design and finite element analysis of the vibration isolation system of STM", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89160Y (10 October 2013); https://doi.org/10.1117/12.2036878

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