Paper
10 October 2013 Optical magnetic field sensor improved by NdFeB ferromagnetic film
Truong Giang Nguyen, Xinbing Jiao, Wenfeng Lei, Yue Ma, Lixin Ma, Bo Qian
Author Affiliations +
Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 89161P (2013) https://doi.org/10.1117/12.2035696
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China
Abstract
In this paper, two types of optical magnetic field sensors have been prepared, one was pure garnet magnetic field sensor, another was garnet with Ta/NdFeB/Ta film grown by magnetron sputtering method at the base pressure of 1.0×10-5Pa, and the working pressure was 0.8Pa. Ta film worked as buffer layer and protective layer, and the NdFeB worked as ferromagnetic film, the atom proportion of NdFeB was 2:14:1. The measuring was based on Magneto-optical Faraday effect. The Faraday rotation was obtained under the conditions of 1.55μm near-infrared light and the magnetic field in range of -150-150Oe. It was found that the garnet sensor with NdFeB film has lower linearity error 0.125% compared with pure garnet sensor 1.42%, and the difference was attributed to the presence of NdFeB ferromagnetic film interact on the garnet.
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Truong Giang Nguyen, Xinbing Jiao, Wenfeng Lei, Yue Ma, Lixin Ma, and Bo Qian "Optical magnetic field sensor improved by NdFeB ferromagnetic film", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89161P (10 October 2013); https://doi.org/10.1117/12.2035696
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KEYWORDS
Garnet

Magnetism

Sensors

Ferromagnetics

Magnetic sensors

Sputter deposition

Tantalum

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