10 October 2013 Experimental research on anti-vibration interferometry based on time-frequency-domain analysis
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Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 89161Z (2013) https://doi.org/10.1117/12.2035878
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China
Abstract
Phase-shifting interferometry is a non-contact precision precise measuring method for optical surface, but it is highly sensitive to external vibrations. A time-and-frequency-domain (TFD) anti-noise phase-shifting interferometry is proposed to eliminate the effect of vibrations and improve the precision of measurement. According to simulations and preliminary experiments, active phase-shifting speed as well as interferogram capture speed should be increased to improve the anti-vibration capability of the TFD method. In this paper, a fast phase-shifting approach based on PZT actuator and interferogram detection with high-speed camera is proposed. Preliminary experimental results are given to demonstrate the approach.
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Yao Hu, Yao Hu, Qun Hao, Qun Hao, Fanghua Zhang, Fanghua Zhang, Yuhan Tian, Yuhan Tian, "Experimental research on anti-vibration interferometry based on time-frequency-domain analysis", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89161Z (10 October 2013); doi: 10.1117/12.2035878; https://doi.org/10.1117/12.2035878
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