Multi-beam synchronous measurement based on PSD phase detection using frequency-domain multiplexing

Ying Duan; Lan Qin; Lian Xue; Feng Xi; Jiubing Mao

doi:10.1117/12.2035899

10 October 2013 Multi-beam synchronous measurement based on PSD phase detection using frequency-domain multiplexing

Ying Duan, Lan Qin, Lian Xue, Feng Xi, Jiubing Mao

Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 89163C (2013) https://doi.org/10.1117/12.2035899
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China

Abstract

According to the principle of centroid measurement, position-sensitive detectors (PSD) are commonly used for micro displacement detection. However, single-beam detection method cannot satisfy such tasks as multi-dimension position measurement, three dimension vision reconstruction, and robot precision positioning, which require synchronous measurement of multiple light beams. Consequently, we designed PSD phase detection method using frequency-domain multiplexing for synchronous detection of multiple modulated light beams. Compared to previous PSD amplitude detection method, the phase detection method using FDM has advantages of simplified measuring system, low cost, high capability of resistance to light interference as well as improved resolution. The feasibility of multi-beam synchronous measurement based on PSD phase detection using FDM was validated by multi-beam measuring experiments. The maximum non-linearity error of the multi-beam synchronous measurement is 6.62%.

Citation Download Citation

Ying Duan, Lan Qin, Lian Xue, Feng Xi, and Jiubing Mao "Multi-beam synchronous measurement based on PSD phase detection using frequency-domain multiplexing", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 89163C (10 October 2013); https://doi.org/10.1117/12.2035899

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