10 October 2013 A small angle dynamic measuring device
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Proceedings Volume 8916, Sixth International Symposium on Precision Mechanical Measurements; 891648 (2013) https://doi.org/10.1117/12.2041641
Event: Sixth International Symposium on Precision Mechanical Measurements, 2013, Guiyang, China
Abstract
Small angle measurement has been widely use for the alignment or error compensation of a mechanical system. In this paper a small angle dynamic measurement device based on laser interference technique is introduced, which consists of a reference module and a measuring module. The measuring module is fixed on the measured object. With the variation of the small tilt angle of the measured object, the phase difference between the two beams from prism1 and prism2 changes according to it. By analyzing the interference patterns, the variation of the small tilt angle can be obtained dynamically. Experimental setup has been established and the results show that the measurement range is 15' with the resolution of 0.08", the measurement error is less than 8″.
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Jie Wang, Jie Wang, Xiaojun Liu, Xiaojun Liu, Liping Zhou, Liping Zhou, Wenlong Lu, Wenlong Lu, Liangzhou Chen, Liangzhou Chen, Yimin Zou, Yimin Zou, } "A small angle dynamic measuring device", Proc. SPIE 8916, Sixth International Symposium on Precision Mechanical Measurements, 891648 (10 October 2013); doi: 10.1117/12.2041641; https://doi.org/10.1117/12.2041641
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