Translation interference pattern in nano-scale precision by phase control based on spatial light modulator

Jie Ma; Yongchun Zhong; Zhe Chen; Kam Sing Wong

doi:10.1117/12.2033728

7 December 2013 Translation interference pattern in nano-scale precision by phase control based on spatial light modulator

Jie Ma, Yongchun Zhong, Zhe Chen, Kam Sing Wong

Author Affiliations +

Proceedings Volume 8923, Micro/Nano Materials, Devices, and Systems; 89230M (2013) https://doi.org/10.1117/12.2033728
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2013, Melbourne, Victoria, Australia

Abstract

A technique of using phase control method to translate the interference pattern was demonstrated. By using a liquid crystals spatial light modulator (LC-SLM) to regulate the phase of beams, real-time dynamic translations of the patterns were achieved. The translation accuracy is up to 10 nm experimentally. This technique can apply to any kind of multi-beam interference pattern and has no limits in translation accuracy and direction, theoretically.

Citation Download Citation

Jie Ma, Yongchun Zhong, Zhe Chen, and Kam Sing Wong "Translation interference pattern in nano-scale precision by phase control based on spatial light modulator", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89230M (7 December 2013); https://doi.org/10.1117/12.2033728

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