Effect of surfaces on thermoelastic damping of nano-resonators

S. Dixit; M. M. Inamdar; D. N. Pawaskar

doi:10.1117/12.2033796

Abstract

The objective of this study is to investigate the role of surfaces on thermoelastic damping of flexural vibrations in nanobeams. In the past, the role of surfaces on thermoelastic damping of a vibrating nanobeam has been discussed by considering only mechanical interaction between surfaces and the rest of bulk without accounting for thermal interaction between them. In this paper we account for heat flow due to conduction between the surface and bulk and a coupled thermo-mechanical heat equation for a thermoelastic surface has been derived. Quality factor of vibrating rectangular nanobeam has been computed using modified thermal boundary conditions for the bulk under adiabatic surface conditions. An expression for surface heat capacity used in modified boundary conditions has been derived using the modified Debye model. A simplified expression for quality factor of thin rectangular nanobeam has been obtained. We note that the quality factor and the frequency at which the maximum dissipation occurs is a function of both mechanical and thermal properties of surface. It has also been noticed that the relative change in thermoelastic dissipation due to surface effect is a function of operating frequency. The present analysis shows that effect of surfaces on quality factor and peak damping frequency increases with decrease in beam thickness. Coupled heat equation for a surface derived in the present work can be used for any general thermoelastic surface.

Citation Download Citation

S. Dixit, S. Dixit, M. M. Inamdar, M. M. Inamdar, D. N. Pawaskar, D. N. Pawaskar, "Effect of surfaces on thermoelastic damping of nano-resonators", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89231U (7 December 2013); doi: 10.1117/12.2033796; https://doi.org/10.1117/12.2033796

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years