20 December 2013 Buried picolitre fluidic channels in single-crystal diamond
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Abstract
We report the generation of sub-surface nanouidic channels from single crystal diamond. To make the channels, we used a combination of ion-beam induced damage and annealing to create a buried, etchable graphitic layer in the diamond. Either laser or focussed ion-beam milling was then used to connect to that layer, and subsequent electro-chemical etching used to remove the graphitic material. The channels had dimensions 100-200 nm thick, 100 μm wide and 300 μm long, which have a total volume around 3 pL; and were around 3 μm below the diamond surface.
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Michelle A. Strack, Barbara A. Fairchild, Andrew D. C. Alves, Philipp Senn, Brant C. Gibson, Steven Prawer, Andrew D. Greentree, "Buried picolitre fluidic channels in single-crystal diamond", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89232X (20 December 2013); doi: 10.1117/12.2035099; https://doi.org/10.1117/12.2035099
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