20 December 2013 Buried picolitre fluidic channels in single-crystal diamond
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We report the generation of sub-surface nanouidic channels from single crystal diamond. To make the channels, we used a combination of ion-beam induced damage and annealing to create a buried, etchable graphitic layer in the diamond. Either laser or focussed ion-beam milling was then used to connect to that layer, and subsequent electro-chemical etching used to remove the graphitic material. The channels had dimensions 100-200 nm thick, 100 μm wide and 300 μm long, which have a total volume around 3 pL; and were around 3 μm below the diamond surface.
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Michelle A. Strack, Michelle A. Strack, Barbara A. Fairchild, Barbara A. Fairchild, Andrew D. C. Alves, Andrew D. C. Alves, Philipp Senn, Philipp Senn, Brant C. Gibson, Brant C. Gibson, Steven Prawer, Steven Prawer, Andrew D. Greentree, Andrew D. Greentree, "Buried picolitre fluidic channels in single-crystal diamond", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89232X (20 December 2013); doi: 10.1117/12.2035099; https://doi.org/10.1117/12.2035099

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