7 December 2013 Long-wavelength infrared Fabry-Perot etalon for multi-spectral thermal imaging
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Abstract
A miniature Fabry-Perot etalon was designed and fabricated to provide spectral filtering capability at the resonance wavelength of 10 μm. A high transmission peak of 85% and a relatively broad bandwidth of 500 nm are expected based on optical modeling. Optimal deposition conditions for process durable thin film materials were developed and optical constants of these materials were characterized. Fabrication of devices was accomplished using standard surface micromachining technique. Released mirrors exhibited a deflection of 400 nm over a length of 150 μm.
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Haifeng Mao, Adrian J. Keating, Dilusha Silva, John M. Dell, Lorenzo Faraone, "Long-wavelength infrared Fabry-Perot etalon for multi-spectral thermal imaging", Proc. SPIE 8923, Micro/Nano Materials, Devices, and Systems, 89234P (7 December 2013); doi: 10.1117/12.2033755; https://doi.org/10.1117/12.2033755
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