15 October 2013 Plasma post-processing of diamond-like carbon nano-coated long-period gratings
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Proceedings Volume 8924, Fourth Asia Pacific Optical Sensors Conference; 89243A (2013) https://doi.org/10.1117/12.2031698
Event: Asia Pacific Optical Sensors Conference 2013, 2013, Wuhan, China
Abstract
This work presents an application of reactive ion etching (RIE) for effective tuning of spectral response and the refractive-index (RI) sensitivity of diamond-like carbon (DLC) nano-coated long-period gratings (LPGs). The technique allows for an efficient and well controlled etching of the DLC by means of O2 and CF4 plasma. The effect of DLC nanocoating etching on spectral properties of the LPGs is discussed. We correlated the decrease in DLC thickness with the shift of the LPG resonance wavelength. The thinning of the overlay effectively changes the distribution of the cladding modes and thus it also has an impact on the device’s RI sensitivity. The advantage of this approach is a capability for post-processing of the nano-coated structures with a good precision (etching rate from 4.6 to 8.1 nm/min for O2 plasma), cleaning the samples and their re-coating according to requested needs.
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Mateusz Śmietana, Mateusz Śmietana, Adrian Krysiński, Adrian Krysiński, Wojtek J. Bock, Wojtek J. Bock, Predrag Mikulic, Predrag Mikulic, } "Plasma post-processing of diamond-like carbon nano-coated long-period gratings", Proc. SPIE 8924, Fourth Asia Pacific Optical Sensors Conference, 89243A (15 October 2013); doi: 10.1117/12.2031698; https://doi.org/10.1117/12.2031698
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