Industrial Excimer Lasers: Continous Operation And Proven Applications

Lindsay Austin; Dirk Basting; Hans-Jurgen Kahlert; Wolfgang Muckenheim; Ulrich Rebhan

doi:10.1117/12.944382

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12 July 1988 Industrial Excimer Lasers: Continous Operation And Proven Applications

Lindsay Austin, Dirk Basting, Hans-Jurgen Kahlert, Wolfgang Muckenheim, Ulrich Rebhan

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Proceedings Volume 0894, Gas Laser Technology; (1988) https://doi.org/10.1117/12.944382
Event: 1988 Los Angeles Symposium: O-E/LASE '88, 1988, Los Angeles, CA, United States

Abstract

Recent tests confirm that commercially available excimer lasers meet most industrial requirements including the most strenuous - continuous constant power operation at maximum specified power ratings. Test results include lifetime data plus the determination of maintenance and operating costs. A few proven industrial applications are reviewed as well as the field experience on their production lines. The field and test data compare favorably.

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Lindsay Austin, Dirk Basting, Hans-Jurgen Kahlert, Wolfgang Muckenheim, and Ulrich Rebhan "Industrial Excimer Lasers: Continous Operation And Proven Applications", Proc. SPIE 0894, Gas Laser Technology, (12 July 1988); https://doi.org/10.1117/12.944382

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