Agile scanning using a MEMS focus control mirror in a commercial confocal microscope

Sarah J. Lukes; David L. Dickensheets

doi:10.1117/12.2042249

12 March 2014 Agile scanning using a MEMS focus control mirror in a commercial confocal microscope

Proceedings Volume 8949, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI; 89490W (2014) https://doi.org/10.1117/12.2042249
Event: SPIE BiOS, 2014, San Francisco, California, United States

Abstract

We present the use of a large stroke deformable membrane mirror for focus control over a range of 123 μm in a commercial confocal microscope at 0.5-0.64 NA. The MEMS mirror is much faster than lens or stage translation allowing synchronization to x-y scanning for agile control over the 3D shape of the surface that is scanned. We describe a novel, low-actuator-count MEMS mirror designed specifically for focus control in scanning laser microscopes and present images taken with the mirror deployed on an Olympus Fluoview FV300.

Citation Download Citation

Sarah J. Lukes and David L. Dickensheets "Agile scanning using a MEMS focus control mirror in a commercial confocal microscope", Proc. SPIE 8949, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI, 89490W (12 March 2014); https://doi.org/10.1117/12.2042249

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