12 March 2014 Agile scanning using a MEMS focus control mirror in a commercial confocal microscope
Author Affiliations +
Abstract
We present the use of a large stroke deformable membrane mirror for focus control over a range of 123 μm in a commercial confocal microscope at 0.5-0.64 NA. The MEMS mirror is much faster than lens or stage translation allowing synchronization to x-y scanning for agile control over the 3D shape of the surface that is scanned. We describe a novel, low-actuator-count MEMS mirror designed specifically for focus control in scanning laser microscopes and present images taken with the mirror deployed on an Olympus Fluoview FV300.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sarah J. Lukes, David L. Dickensheets, "Agile scanning using a MEMS focus control mirror in a commercial confocal microscope", Proc. SPIE 8949, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI, 89490W (12 March 2014); doi: 10.1117/12.2042249; https://doi.org/10.1117/12.2042249
PROCEEDINGS
11 PAGES


SHARE
Back to Top