Agile scanning using a MEMS focus control mirror in a commercial confocal microscope

Sarah J. Lukes; David L. Dickensheets

doi:10.1117/12.2042249

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12 March 2014 Agile scanning using a MEMS focus control mirror in a commercial confocal microscope

Sarah J. Lukes, David L. Dickensheets

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Proceedings Volume 8949, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI; 89490W (2014) https://doi.org/10.1117/12.2042249
Event: SPIE BiOS, 2014, San Francisco, California, United States

Abstract

We present the use of a large stroke deformable membrane mirror for focus control over a range of 123 μm in a commercial confocal microscope at 0.5-0.64 NA. The MEMS mirror is much faster than lens or stage translation allowing synchronization to x-y scanning for agile control over the 3D shape of the surface that is scanned. We describe a novel, low-actuator-count MEMS mirror designed specifically for focus control in scanning laser microscopes and present images taken with the mirror deployed on an Olympus Fluoview FV300.

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Sarah J. Lukes and David L. Dickensheets "Agile scanning using a MEMS focus control mirror in a commercial confocal microscope", Proc. SPIE 8949, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXI, 89490W (12 March 2014); https://doi.org/10.1117/12.2042249

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