20 February 2014 Improved performance of highly multiplexed silicion-on-insulator microring sensor chips by surface structure implementation
Author Affiliations +
Abstract
Silicon-on-insulator microring resonators have proven to be an excellent platform for label-free nanophotonic biosensors. The high index contrast of the silicon-an-insulator platform allows for fabrication of micrometer size sensors and a high degree of multiplexing. To enable robust, low-noise performance of a microring resonator sensor chip in a lab-on-a-chip setting, flood illuminating an array of vertical grating couplers is a promising approach to couple input light into the chip. This technique provides a very high alignment tolerance while at the same time exciting multiple sensors simultaneously for rapid parallel read-out. We demonstrate this technique to obtain a highly multiplexed chip output combined with real time sensor information. However, parasitic reflections on the chip surface can deteriorate the sensor signal and limit the performance. We investigate the use of surface structures to limit these parasitic signals and show a significant improvement of the sensor operation.
© (2014) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sam Werquin, Sam Werquin, Diedrik Vermeulen, Diedrik Vermeulen, Arne Goes, Arne Goes, Anabelle Van Eeghem, Anabelle Van Eeghem, Peter Dubruel, Peter Dubruel, Peter Bienstman, Peter Bienstman, } "Improved performance of highly multiplexed silicion-on-insulator microring sensor chips by surface structure implementation", Proc. SPIE 8954, Nanoscale Imaging, Sensing, and Actuation for Biomedical Applications XI, 89540O (20 February 2014); doi: 10.1117/12.2037266; https://doi.org/10.1117/12.2037266
PROCEEDINGS
8 PAGES


SHARE
Back to Top