28 February 2014 Zero-phonon-line pumped 100-kHz Yb:YAG thin disk regenerative amplifier
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Abstract
We are developing 100-kHz picosecond Yb:YAG thin disk regenerative amplifier with 500-W average power for medical and industrial applications. Especially in case of the next generation of semiconductor lithography, high average power solid-state laser with picosecond pulse duration as pre pulse source is a key element to realize 1-kW EUV lithography source. We compared the output characteristics of CW laser operation pumped at 940-nm and 969-nm, and measured the surface temperature of thin disk. We found that the surface temperature of thin disk pumped at 960-nm was much lower than that pumped at 940-nm. We obtained 83-W output from thin disk regenerative amplifier at the repetition rate of 100-kHz pumped at 969-nm. The measured pulse duration was 1.9-ps.
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Taisuke Miura, Taisuke Miura, Martin Smrž, Martin Smrž, Siva Sankar Nagisetty, Siva Sankar Nagisetty, Ondřej Novák, Ondřej Novák, Michal Chyla, Michal Chyla, Patricie Severová, Patricie Severová, Akira Endo, Akira Endo, Tomáš Mocek, Tomáš Mocek, } "Zero-phonon-line pumped 100-kHz Yb:YAG thin disk regenerative amplifier", Proc. SPIE 8959, Solid State Lasers XXIII: Technology and Devices, 895923 (28 February 2014); doi: 10.1117/12.2040227; https://doi.org/10.1117/12.2040227
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